TiO2/airgap-based polarizing beam splitter: design, simulation, and fabrication based on MEMS technologies
Optics and Lasers in Engineering(2020)
摘要
•New polarizing beam splitter based on air and TiO2 thin-films•High refractive index contrast ensures the separation of s-/p- polarization states•The air/TiO2 based multilayer is obtained using conventional MEMS technologies
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关键词
polarizing beam splitter,airgap-based
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