TiO2/airgap-based polarizing beam splitter: design, simulation, and fabrication based on MEMS technologies

M.J. Maciel, N.M. Gomes,S. Pimenta,J.F. Ribeiro,J.H. Correia

Optics and Lasers in Engineering（2020）

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摘要

•New polarizing beam splitter based on air and TiO2 thin-films•High refractive index contrast ensures the separation of s-/p- polarization states•The air/TiO2 based multilayer is obtained using conventional MEMS technologies

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关键词

polarizing beam splitter,airgap-based

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