X-Ray Characterization Of Epitaxial (Sr,Ba)Tio3 Films Grown By Pulsed Laser Deposition

Epitaxial single crystal thin films of Sr1-xBaxTiO3 (x=0, 0.2 and 0.5) have been deposited on MgO (001), SrTiO3 (001) and LaAlO3 (012) substrates using pulsed laser deposition (PLD). The full width at half maximum (FWHM) of the X-ray rocking curves for the (002) reflection of the Sr1-xBaxTiO3 were exceptionally narrow for films deposited on SrTiO3 (140 s of arc) and LaAlO3 (72 s of are) despite a lattice mismatch +/-1% and 4% respectively. X-ray rocking curves for films deposited on MgO substrates were significantly broader (+/-2500 arcsec). The data show that PLD can be used to grow films of MBE quality.