Development of a Vector Display System Based on a Surface-Micromachined Micromirror.

This paper presents a small-size low-power portable vector display system. The display system uses a micromirror which consists of a simple two-thin-film structure and is fabricated using a surface-micromachining process, i.e., Polysilicon Multi User MEMS Processes. The micromirror exhibits rotational motion around two axes as well as translational motion through four repulsive-force electrostatic...