Development of a Vector Display System Based on a Surface-Micromachined Micromirror.

IEEE Transactions on Industrial Electronics(2012)

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摘要
This paper presents a small-size low-power portable vector display system. The display system uses a micromirror which consists of a simple two-thin-film structure and is fabricated using a surface-micromachining process, i.e., Polysilicon Multi User MEMS Processes. The micromirror exhibits rotational motion around two axes as well as translational motion through four repulsive-force electrostatic...
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关键词
Micromirrors,Vectors,Laser beams,Actuators,Measurement by laser beam,Voltage measurement,Electrostatic actuators,Microelectromechanical systems
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