Pull-in Phenomena Analysis of ElectrostaticMicro-Actuator with Torsion Heam
Micronanoelectronic Technology（2006）
摘要
A model of a micro-actuator with torsion beam,and the analytical formulae are derived for analysis of pull-in phenomena.The effect of the structural parameters on pull-in phenomena is discussed,and analytical results are given for the certain device.The ratio of pull-in angle to the maximum travel angle is 44.04%,and which is not correlative with the parameters of torsion beam.
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关键词
torsion beam,pull-in phenomena,electrostatically actuated,micro-actuator
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