Selected topics in rf coplanar probing
IEEE Transactions on Microwave Theory and Techniques（2003）
摘要
The RF coplanar probe is a popular tool for launching high-frequency signals onto and off of a wafer. Physically contacting the die, it establishes a crucial link between the test system and wafer. Their proper use permits a higher degree of measurement accuracy compared to test fixturing. To augment the reader's understanding, this tutorial reviews selected issues related to the design, construct...
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关键词
Radio frequency,Probes,System testing,Fixtures,Integrated circuit measurements,Radiofrequency integrated circuits,Semiconductor device modeling,Design automation,Coaxial cables,Coplanar waveguides
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