Effect Of Postdeposition Aging On Thin Indium Films
THIN SOLID FILMS（1987）
Abstract
The effect of post-deposition aging on vacuum-deposited thin indium films was studied. Low and high resistivity films of thicknesses about 1000 Å and less than 50 Å respectively were deposited onto Corning 7059 glass substrates. The electrical resistance of the low resistivity films was found to decay asymptotically with time just after deposition. However, the reverse trend was observed for high resistivity films. Similar behaviour has also been reported by other workers for thin gold films.
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Key words
thin indium films,aging,post-deposition
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