RF model of 3-RC network structure for metal–insulator–metal capacitor

I. M. Kang,T.-H. Choi,J. H. Joe,S.-J. Jung,J. Jung,H. Lee,G. Jo, Y.-K. Kim,H.-G. Kim,K.-M. Choi

Electronics Letters（2008）

Cited 1|Views14

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Abstract

A radio-frequency (RF) equivalent circuit model for the metal-insulator-metal (MIM) capacitor with both side bottom plate contact is presented. The proposed model consists of 3-distributed RC networks and substrate networks. The accuracy of the MIM capacitor model is verified for Z-parameters, effective capacitance (Ceff), quality factor (Q), and MIM capacitor impedance (Zc) up to 20 GHz. The effe...

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Key words

capacitors,equivalent circuits,integrated circuit modelling,MIM devices,Q-factor,radiofrequency integrated circuits,RC circuits

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