The Optical Dielectric Function In Monolithic Baxsr1-Xtio3 Films

D. BRUZZESE,K. J. FAHNESTOCK,C. L. SCHAUER,J. E. SPANIER,C. V. WEISS,S. P. ALPAY,M. W. COLE,N. M. SBROCKEY,G. S. TOMPA

INTEGRATED FERROELECTRICS（2009）

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摘要

We present the results of characterization and analysis of the optical dielectric function of monolithic BaxSr1-xTiO3 films prepared by metal-organic solution deposition (MOSD). Lorentz Oscillator + Drude parameters and band gap for selected compositions are determined from variable-angle spectroscopic ellipsometry. Variation of the complex optical dielectric function is seen, and the results suggest that spectroscopic ellipsometry can be an effective means of both ex situ analysis and in situ monitoring of film composition during other BST and related film material growth processes.

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关键词

Ferroelectric thin films, phase shifters, BST, spectroscopic ellipsometry, optical dielectric function

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