对国内硅烷生产的几点看法

Low Temperature and Specialty Gases(2009)

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Abstract
阐述了国内硅烷的生产现状、所采用的技术路线以及在引进国外技术方面所面临的问题。对硅化镁法生产硅烷的工艺过程中比较突出的几个问题如氨的回收,杂质水、氢和碳氢化合物等谈了自己的看法和处理意见。
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Key words
amorphous silicon film solar cells,magnesium silicide,silane,technological routes,polycrystalline silicon
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