精缩机制版阵列插图研究
Microelectronics(2008)
Abstract
介绍了利用3696精缩机进行制版阵列插图的研究工作,总结了插图工艺制作的基本方法、常见问题及解决办法。通过具体应用实例,对多种形式的阵列插图制作进行了有益的探讨,对光掩模版的制造具有一定的指导意义。
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Key words
Pattern array insertion,Semiconductor process,Mask making,Photorepeater
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