A pH-isfet and an integrated ph-pressure sensor with back-side contacts

Solid-state sensors are being used more and more in the biomedical field for research as well as for monitoring devices. However, these sensors are often not designed for a specific application, which may inhibit their successful application. Specific sensors can be fabricated when technologies for different sensor designs are integrated. As an example of such an approach, a pH-ISFET for dntal plaque pH measurements and a combined pH-pressure sensor for oesophageal studies are presented. Both sensors show imporved properties compared to existing systems.