MOCVD synthesis of yttria doped perovskite type SrCeO3 thin films

Yttria doped SrCeO3 films were deposited on YSZ substrates by MOCVD using a novel solid precursor containing a mixture of β-diketonate complexes of Sr, Ce and Y. The deposited films were polycrystalline consisting of nanoscale crystallizes. Single crystal YSZ substrate was found to be most suitable for preparing yttria doped SrCeO3 films. Using dry and well-mixed precursor was critical for obtaining a single phase yttria doped perovskite SrCeO3 films by the MOCVD method.