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Effects of the Structural Layer in MEMS Substrates on Mechanical and Electrical Properties of Pb(Zr0.52Ti0.48)O3 Films

Dan Liu,Bo Zhou,Sang H. Yoon,Howard C. Wikle,Yaqi Wang,Minseo Park,Barton C. Prorok,Dong-Joo Kim

Ceramics international（2011）

Cited 19|Views14
Key words
Mechanical properties,Electrical properties,PZT,Substrates
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