Optical And Structural Evaluation Of Sic Nanocrystallites

This paper presents results of the non-contact and non-destructive characterization of porous SiC layers using Raman scattering spectroscopy, scanning electron microscopy as well as atomic force microscopy methods. The comparative study of the Raman spectroscopy on the bulk SiC and porous SiC layers has shown a number of new features specific for nanocrystallite materials, which have been analyzed and discussed.