Small cluster ions from source of negative ions by cesium sputtering

We investigated the delivery of small cluster ions using a source of negative ions by cesium sputtering (SNICS). The negative cluster ions of Bn, Cn, Sin, Con, Cun, Gen, Aun, GeBn and SiBn have been extracted by SNICS. Adequate beam current of some small clusters was obtained by changing several parameters for cluster ion yield. After a comprehensive study of the operation parameters, such as target material selection, target geometry, sputtering voltage and current, the small cluster ion current can be increased by several orders of magnitude, with little change on the monomer ion yield.