柔性压电式微位移机构在精密机床定位中的应用研究
JOURNAL OF CHANGCHUN UNIVERSITY OF SCIENCE AND TECHNOLOGY(NATURAL SCIENCE EDITION)(2006)
Abstract
研究、设计了一种柔性压电式微定位机构。此机构采用压电陶瓷作为微位移驱动器,柔性铰链为导向机构,对丝杠螺母传动的精密机床工作台的运动位置进行自动补偿,实现了超精密定位。文中对柔性铰链机构进行了合理的设计及参数分析,并应用于精密机床中进行定位精度测试。实测结果表明,采用柔性压电式微位移机对精密机床工作台二次精定位,可使工作台定位精度提高到0.01μm,可满足精密、超精密加工需要。
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Key words
flexible joint,precise machine tool,micro-displacement mechanism of PZT,positioning accuracy
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