Optimization of Structure of Large Format TES Arrays

Hiroshi Yoshitake,Yuichiro Ezoe,T. Yoshino, Kaniaki Mukai,Kenichi Ishikawa,Kazuhisa Mitsuda,Noriko Y Yamasaki,Yoshitaka Ishisaki,Hiroki Akamatsu,Ryutaro Maeda,Toshiyuki Takano

IEEE Transactions on Applied Superconductivity（2009）

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摘要

We fabricated 16 times 16 format arrays of 180 mum square Ti/Au superconducting transition edge X-ray microcalorimeters of which transition temperatures range from 130 to 220 mK. All pixels are wired with Al, and stand on SiO2 and SiNx membranes that work as a weak thermal link. The membrane structure is formed by deep reactive ion etching. Energy resolution of a pixel in the array without a Au ab...

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关键词

Etching,Energy resolution,Gold,Biomembranes,Superconducting transition temperature,Astronomy,Superconducting filaments and wires,Temperature distribution,Superconducting films,X-ray detection

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