Investigation of Biomimetic Apatite Growth on DLC-ZrO2 Thin Films Prepared by MOCVD
Materials Science Forum(2010)
摘要
Thin films of diamond-like carbon (DLC) containing zirconium dioxide (DLC-ZrO2) have been deposited onto conducting (100) silicon wafer substrates using a pulsed direct-current metal organic plasma activated chemical vapour deposition (MOPACVD) technique. DLC-ZrO2 thin films were immersed in simulated body fluid (SBF) at 37 degrees C. The formation of apatite as a function of time was determined using a number of characterization techniques including XPS, FTIR, XRD, SEM and EDX. The XPS results confirmed the presence of calcium and phosphorus on the DLC-ZrO2 film surfaces after immersion in SBF. FTIR and XRD results confirmed that biomimetic apatite was formed on DLC-ZrO2 as an amorphous film. Ball-like particles composed of Ca and P were observed on the film surface. EDX results also confirmed that Ca and P were deposited on the film surface.
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关键词
Metal-organic plasma activated chemical vapour deposition (MOPACVD),diamond-like carbon (DLC),zirconium dioxide (ZrO2),simulated body fluid (SBF),biomimetic apatite
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