Effect of thin titanium interfacial layers on the formation of palladium silicide on siliconD M Hoffman, J T Mcginn, F J Tams,J H ThomasJOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS（1987）引用 8|浏览1暂无评分关键词titaniumAI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
