Diodes Fabricated by Electron Beam Doping (Superdiffusion)Technique in Semiconductors at Room Temperature

Diodes were fabricated by electron beam doping (superdiffusion) for a non-equilibrium condition by electron irradiation. The entire electron beam doping process is composed mainly of three kinds of steps, as follows: (l displaced atoms by electron irradiation, (2 surface diffusion of atoms, (3 kick-out mechanism of impurity atoms. Impurity doping can be interpreted by the kick-out mechanism, which is a combination of interstitialcy and direct interstitial diffusion.