国内高纯气体应用现状
Low Temperature and Specialty Gases(2010)
Abstract
阐述了我国高纯气体应用现状,强调了在电子工业生产中,特种高纯气体在大规模集成电路、液晶显示器、多晶硅和薄膜太阳能电池、新型电光源、光电半导体器件、光纤通讯器件中的应用;在化学测量质量保证中,校准测量体系,评价分析方法的可靠性,检测分析仪器性能,实验室间检测能力比对中的应用;在工业生产中,在单项测量仪器或在线流程分析仪器中作为"零点气"的应用.
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Key words
"zero point" gas,high purity gas,quality assurance,electronics industry
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