In situ analysis of the thermal behavior in the Zr-based multi-component metallic thin film by pulsed laser deposition combined with UHV-laser microscope system

The thermal behavior of the Zr-based multi-component metallic thin films was investigated under an atmospheric N2 condition by using pulsed laser deposition (PLD)-combined with in situ laser microscope (LM) system. The Zr-based multi-component metallic thin films were prepared in amorphous by PLD with a stoichiometric target of the Zr-based metallic glass. By comprehensive study with ex situ analyses such as XRD, SEM and EPMA techniques, it was found that the gradual formation of Zr2Ni alloy particles occurred above 500°C, and subsequently the inhomogeneous contrast, probably owing to the partial formation of ZrO2 on the film surface appeared at high temperature.