Fabrication of soft X-ray beam splitters for use in the wavelength region around 13 nm

Two kinds of soft X-ray beam splitters were fabricated for use at wavelengths around 13 nm: a Mo/Si multilayer beam splitter for near normal incidence and a Ru/SiN bilayer beam splitter for grazing incidence. In the wavelength region around 13 mn, measurements showed the Mo/Si multilayer beam splitter to have a reflectivity of 28% and a transmittance of 32% at a grazing incidenct angle of 80degrees, and the Ru/SiN bilayer beam splitter to have a reflectivity and transmittance of 11% at a grazing incidenct angle of 17.5degrees.