Single-Mode Vertical-Cavity Surface-Emitting Lasers with A Deep-Etched Half-Ring-Shaped Holey Structure

A single-mode oxide-confined vertical-cavity surface-emitting laser (VCSEL) with deeply-etched half-ring-shaped holey structure for fiber-optic applications is demonstrated. Single fundamental mode continuous-wave output power of 2.6 mW has been achieved in the 850 nm range, with a threshold current of approximately 1 mA. Side-mode suppression ratio (SMSR) larger than 26 dB has been measured. Contrary to the previously reported surface relief methods, the deep-etched (approximately 2.2 µm in depth) holey structure in this paper provides another approach to achieve single-mode operation of the VCSEL with a larger oxide aperture.