Weight-scale, XRR and corona charge method on back-end dielectrics for 65 and 45nm technology nodes

Microelectronic Engineering(2008)

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摘要
The monitoring of the back-end dielectrics for 65 and 45nm technology nodes is of great interest to ensure the integration of those materials into damascene structure. Several metrology methods were compared for density and k value measurements. It was shown that the densities measured with XRR and weight-scale were identical and that density could be correlated to corona charge method k value thanks to a Clausius-Mosotti-like relation. According to these results, it appeared that, for uniformly deposited and stable materials, weight-scale measurements can give accurate and fast monitorings. On the contrary, non-homogeneous materials should preferably be monitored with XRR or corona charge method depending on the controlled parameter.
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关键词
Corona charge method,charge method k value,controlled parameter,technology node,XRR,corona charge method,fast monitorings,Weight-scale,Clausius-Mosotti-like relation,Low- k material,weight-scale measurement,k value measurement,back-end dielectric,Monitoring,metrology method,damascene structure
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