A Microfabricated Sensor for Thin Dielectric Layers.P. Fierlinger,R. DeVoe,B. Flatt,G. Gratta,M. Green,S. Kolkowitz,F. Leport,M. Montero Diez,R. Neilson,K. O'Sullivan,A. Pocar,J. WodinReview of Scientific Instruments(2007)引用 8|浏览18关键词Microfabricated DevicesAI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要