Reactive ion beam etching of polyimide thin filmsWilliam E Vanderlinde,Arthur L RuoffJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B（1988）引用 44|浏览3暂无评分关键词thin film,ion beamAI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
