Preoxidation as a General Approach to Suppressing Orange-Peel Coupling in Magnetic Tunnel Junctions
Magnetics, IEEE Transactions（2006）
Abstract
We have found that preoxidation of the bottom electrode prior to deposition of Al2O3 or MgO is very effective as a general approach to suppressing orange-peel coupling in magnetic tunnel junctions. When orange-peel coupling is suppressed, the hard-axis saturation field of the free layer is greatly reduced
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Key words
aluminium compounds,magnesium compounds,magnetic multilayers,magnetic tunnelling,magnetoresistive devices,oxidation,Al2O3,MgO,bottom electrode preoxidation,hard-axis saturation field reduction,magnetic tunnel junctions,orange-peel coupling suppression,Magnetic tunnel junctions,orange-peel coupling,preoxidation
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