Ultra-Low Thermal Conductivity Infrared Heat-Sensitivity Suspended Microbridge of Polyimide

One of the key techniques of integrating uncooled heat imaging detector arrays is the manufacturing of the heat-sensitive suspended microbridge with ultra-low thermal conductivity.A polyimide suspended microbridge was manufactured with laser micromachining by Pt heat-sensitive thin film prepared by pulsed laser deposition technology.The test performances of the Pt/polyimide microbridge made by laser micromachining show that the thermal conductivity of the Pt/polyimide microbridge is 3.98×10-7 W/K.The Pt thin film adheres well to the polyimide substrate.The thermal conductivities of the bridge legs are so low that the I-V characteristic line of Pt/polyimide microbridge curves obviously when the bia voltage is 0～10 V.The response time of Pt/polyimide microbridge is shorter than 100 ms.