Microstructure and growth mechanism of PtAl2O3 co-sputtered nanocermet films studied by SAXS, TEM and AFM
PHYSICA A-STATISTICAL MECHANICS AND ITS APPLICATIONS(1997)
摘要
The physical properties of nanocermets are related mostly to their morphology. In this contribution, we present the microstructural and morphological evolution of co-sputtered Pt-Al2O3 granular films with thickness, metal concentration and thermal annealing. These investigations are achieved by grazing angle X-ray reflectometry, transmission electron microscopy and atomic force microscopy. The experimental results show that (i) the diameter of platinum clusters increases as a function of film thickness, annealing temperature and metal concentration and (ii) a columnar growth is observed whose morphology also depends on the previous parameters and on the growth direction.
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关键词
cermet films,microstructure,growth,low-angle X-ray scattering,transmission electron microscopy,atomic force microscopy
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