Fabrication Of Freestanding Linbo3 Thin Films Via He Implantation And Femtosecond Laser Ablation

Ophir Gaathon,Avishai Ofan,Jerry I. Dadap,Lakshmanan Vanamurthy,Sasha Bakhru,Hassaram Bakhru,Richard M. Osgood

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A（2010）

引用 2|浏览20

暂无评分

摘要

The authors report using a combination of ion-implantation exfoliation and femtosecond laser ablation to fabricate thin (micrometers-thick) single-crystal films of a complex oxide, LiNbO3. The process physics for the method is bounded by the threshold for ablation and the onset of laser thermal outdiffusion of the implanted He used in exfoliation selective etching.

查看译文

关键词

etching, helium, high-speed optical techniques, ion implantation, laser ablation, lithium compounds, thermal diffusion, thin films

AI 理解论文

溯源树

样例

生成溯源树，研究论文发展脉络

Chat Paper

正在生成论文摘要