A NEW HIGH PRESSURE RINSING SYSTEM ESTABLISHED AT DESY

msra(2009)

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摘要
In 2007 a new High Pressure Rinsing (HPR) system was developed at DESY and is operational since 2008. Beside implementations of improvements on high pressure rinsing systems lay out, one goal of the design is to set up a prototype high pressure rinsing stand applicable in industry and in an industrial production line. After commissioning, the new high pressure rinsing stand became a standard hardware in use for the cavity preparation processes at DESY. We report on design specialities and experiences gained so far in more than 300 rinsing processes of about 2 hours length.
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关键词
high pressure,industrial production
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