Characterization of Amorphous GMI Thin-Film Meander Trilayers

This paper presents the magnetic properties of CoFeB trilayer thin films in relation to the high-frequency impedance responses. Fifty- and 100-nm-thin amorphous layers with a central 100- and 200-nm-thin Cu layer, respectively, were sputtered onto a thermally oxidized Si wafer. 300-mum-long meanders of 3-20-mum width were structured using a standard mask with various meanders, which were connected...