Combined synchrotron x-ray diffraction and micro-Raman for following in situ the growth of solution-deposited YBa2Cu3O7 thin films

Journal of Materials Research(2005)

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摘要
A unique combination of in situ synchrotron x-ray diffraction, and in situ micro-Raman spectroscopy was used to study the growth process of YBa2CU3O6+x films obtained by metal organic decomposition using trifluoroacetate precursor on LaAlO3 substrates. The techniques give complementary information: x-ray diffraction, gives insight into the structural growth, whereas micro-Raman spectroscopy gives information of the chemical composition with additional information on the texture. To perform both experiments in situ, a special high-temperature process chamber was designed.
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关键词
raman spectroscopy,x ray diffraction,thin film
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