Enhanced Adhesion of Copper to Dielectrics Via Titanium and Chromium Additions and Sacrificial ReactionsSW RUSSELL,SA RAFALSKI,RL SPREITZER,J LI,M MOINPOUR,F MOGHADAM,TL ALFORDThin Solid Films(1995)引用 122|浏览8关键词ADHESION,COPPER,INTERFACES,METALLIZATIONAI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要