AFM and STM Investigations of Electroluminescent SiO₂/Si Superlattices Prepared by Chemical Vapour Deposition

L. Heikkilä,Tom A Kuusela,H.-P. Hedman,Alexander Anatolevich Pavlov,H. Ihantola

Solid State Phenomena（1997）

引用 6|浏览3

暂无评分

摘要

Chemical vapour deposition in low pressures has been used to prepare SiO2/Si superlattices of 1-3 nm in thickness in order to manufacture electroluminescent components. The AFM and STM studies are presented for investigation of surface morphology and electrical properties of superlattice. The current-voltage characteristic and the electro-luminescence spectrum are also shown.

查看译文

关键词

electroluminescence,SiO2/Si superlattice,AFM,STM,CVD

AI 理解论文

溯源树

样例

生成溯源树，研究论文发展脉络

Chat Paper

正在生成论文摘要

AFM and STM Investigations of Electroluminescent SiO2/Si Superlattices Prepared by Chemical Vapour Deposition

AFM and STM Investigations of Electroluminescent SiO₂/Si Superlattices Prepared by Chemical Vapour Deposition