Fabrication of photonic crystals on several kinds of semiconductor materials by using focused-ion beam method
Thin Solid Films(2007)
Abstract
In this paper, we introduced the fabrication of photonic crystals on several kinds of semiconductor materials by using focused-ion beam machine, it shows that the method of focused-ion beam can fabricate two-dimensional photonic crystal and photonic crystal device efficiently, and the quality of the fabricated photonic crystal is high. Using the focused-ion beam method, we fabricate photonic crystal wavelength division multiplexer, and its characteristics are analyzed.
MoreTranslated text
Key words
Photonic crystal,Semiconductor,Focused-ion beam
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined