Effect of parasitic resistance on a MEMS vibratory gyroscopes due to temperature fluctuations
NEMS（2011）
Abstract
Parasitic resistance is one of the most prevalent error sources preventing the performance of MEMS vibratory gyroscopes. This paper reports the effect of parasitic resistance on the performance of a MEMS vibratory gyroscope which is suspended with a slanted cantilever. The parasitic resistance and capacitance of the micromachined gyroscope were analyzed. The electrical model of the overall system was built. The transfer function of the gyroscope was derived as a parallel connection of a mass-spring-damper model and a R-C network made of parasitic resistance and capacitance. The parasitic resistance affects on the performance of the frequency response was simulated. The temperature characteristic of the frequency response was tested, which is in accordance with the simulated results. The gain of the frequency response changed about 20% in dBs over the range of 30°C to 60°C.
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Key words
error sources,parasitic resistance,mems vibratory gyroscopes,temperature characteristic,frequency response,parasitic capacitance,microsensors,cantilevers,temperature 30 degc to 60 degc,r-c network,mems vibratory gyroscope,micromachined gyroscope,slanted cantilever,temperature fluctuations,micromachining,gyroscopes,transfer function
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