Overview of Parylene AF_4,a new-type conformal polymer coating material
Modern Chemical Industry（2008）
Abstract
Parylene AF4 is a new type of conformal polymer coating materials,its film has not only the common properties of parylene series,but also the excellent anti-ultraviolet and anti-aging characteristics.The methods for Parylene AF4 preparation,deposition process for film and thecharacteristic parameter of Parylene AF4 are introduced.At the same time,the research focal domain and the future of application of Parylene AF4 are reviewed.
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Key words
chemical vapor phase deposition,Parylene AF4,conformal polymer coating material,kinetics of deposition
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