Determination of the deviations in multilayers from X-ray diffraction profiles

X.C. He,H.S. Shen,X.Y. Yuan,Z.Q. Wu

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment（1991）

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摘要

Computer simulations of the X-ray reflection profile of a heavy-light element multilayer with random or systematic deviations are presented. A brief treatment for distinguishing the origin and character of the deviations is discussed.

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关键词

computer simulation,x ray diffraction,x ray reflectivity

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