High Resolution Elemental And Magnetic Distribution Mapping And Chemical Bonding States Of Co : Tio2 Films: A Sam, Mfm And Xps Study

We have used liquid-delivery metal-organic chemical vapor deposition (LD-MOCVD) to grow polycrystalline CoxTi1-xO2 anatase films on SiO2/Si substrates. A scanning Auger microscope (SAM) technique is introduced to obtain the elemental mapping images from the Co-doped TiO2 film. The existence of Co-rich complex oxide compound was identified from an elemental distribution of the annealed film. The magnetic distribution of the film was investigated using a magnetic force microscope (MFM). The co-existence of Co-metal states with Co-oxide compounds at the surface region of the film were investigated by narrow-scans of X-ray photoelectron spectroscopy (XPS).