Near surface damage induced in polyimides by ion beam etchingWilliam E Vanderlinde,Peter J Mills,Edward J Kramer,Arthur L RuoffJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B（1985）引用 13|浏览6暂无评分关键词ion beamAI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
