Structure and corrosion properties of Al/Si multilayers

Al/Si multilayer films were synthesized by sputter deposition. Layer thickness were varied from 3 to 35 nm. The multilayers were composed of amorphous Si layers and (111) oriented crystalline Al layers. Corrosion properties in 0.1 M HCl varied with their modulation wavelength. With decreasing wavelength, the corrosion resistance remarkably increased.