Rapid optical measurement of surface roughness of BiFeO 3 films for nonvolatile memory application

An optical inspection system for rapid surface roughness measurement of BiFeO 3 (BFO) thin films is developed. It is found that y = − 121 . 45 x + 212 . 81 is a trend equation for characterizing the surface roughness of BFO thin films. The incident angle of 60 ◦ is a good candidate for measuring the surface roughness of BFO thin films. The maximum measurement error rate of the optical inspection system developed is less than 2.6%. The savings in inspection time of the surface roughness of BiFeO 3 thin films is up to 90%.