Methodologies For The Assembly Of A Fiber-Coupled Mems Fourier Transform Spectrometer
IEEE TRANSACTIONS ON COMPONENTS AND PACKAGING TECHNOLOGIES(2009)
Abstract
This manuscript presents methodologies followed in the construction and packaging of a 3-D microelectromechanical system (MEMS) Fourier transform (FT) spectrometer based on integrated heterogeneous microassembly and packaging systems. We develop procedures, assembly, and packaging work-cells configured for sequential active alignment of miniaturized optical components. Component-to-system-level tolerance analysis is introduced to compensate for the misalignments associated. Furthermore, an inverse methodology based on the self-alignment of fibers is presented to counter the shifts resulting from the fiber packaging process.
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Key words
Assembly, microelectromechanical system (MEMS), packaging, spectrometer
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