Ellipsometric Measurements Of Barrier Layer In Composite Aluminum-Oxide Films

ELECTROCHIMICA ACTA(1978)

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摘要
The composite oxide film (hydrous + anodic) formed on aluminum foil was chemically stripped to remove only the outer hydrous layer. Ellipsometry of the remaining barrier film showed it to be thinner and have a higher refractive index than conventional anodic barrier films grown to the same voltage. Reanodization to improve film stability gave a further increase in refractive index which indicated that the barrier film had contained some voids. The barrier film is almost entirely crystalline γ-Al 2 O 3 and the higher field strength compared with conventional amorphous anodic films on aluminum is believed to be a characteristic of the denser oxide.
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