Deposition of nano-diamond-like carbon films by an atmospheric pressure plasma gun and diagnostic by optical emission spectrum on the process

At an atmospheric pressure, with Ar as diluted gas and CH4 as precursor gas, nano-scale diamond-like carbon (n-DLC) film was successfully deposited on P-silicon substrate by a dielectric barrier discharge (DBD) plasma gun. The structure and composition of DLC film were analyzed by Fourier Transform Infrared (FTIR) spectroscopy and Laser Raman spectroscopy; through Scanning Electron Microscope (SEM) and Atomic Force Microscopy (AFM), one observed the surface morphology of DLC film; the thickness and the mechanical property were determined by surface profilemeter and friction and wearability tester, respectively. Also, in-situ optical emission spectroscopy (OES) was applied to diagnose radical reactions in DBD gun. The role of reactive particles for DLC growth process is expected to identify.