A capacitive MEMS Veriloga-Based Sensor System for Building Integrity Monitoring.

A capacitive MEMS Ultra-Low-Power readout for accelerometers and strain sensors using VerilogA models is presented. The VerilogA model of the accelerometers and strain sensors allows the simulation of a system in a half-bridge configuration. The gain of the system is controlled by integrating pulses from the excitation voltage which accurately controls the Signal-to-Noise ratio. A Figure-of-Merit of [Formula: see text] was achieved for a sensor range of ±2.0 g and ±20,000 με over a 100 Hz bandwidth. Residual motion artefacts are also canceled by the system.