ULVAC research and development of Cat-CVD applications

Shin Asari,Tetsushi Fujinaga,Makiko Takagi,Masanori Hashimoto,Kazuya Saito,Masamichi Harada,Michio Ishikawa

Thin Solid Films（2008）

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摘要

This paper reports the feasibility for industrial implementation of Cat-CVD (Hot-Wire CVD) technology. Some application examples are shown, and their features and problems are described. Cat-CVD is a unique technology which has a lot of possibilities. Some of them will be commercialized in the near future, but the others need a breakthrough for mass production.

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关键词

Cat-CVD,Hot-Wire CVD,Silicon nitride,Radical,Solar cell

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