Electron beam probing of insulators
EMC 2008 14th European Microscopy Congress 1–5 September 2008, Aachen, Germany(2008)
Abstract
Electron beam irradiation and charge injection associated by selfconsistent charge transport in insulating samples are described
by means of an electron-hole flight-drift model (FDM) implemented by an iterative computer simulation [1,2]. Ballistic scattering
and transport of secondary electrons and holes is followed by electron and hole drift, their possible recombination and/or
trapping in shallow and deep traps. Furthermore a detrapping by the temperature- and field-dependent Poole-Frenkel-effect
becomes possible allowing even a charge hopping transport. In this context a special surface layer has been installed to investigate
surface leakage currents, see Fig.1.
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Key words
Non-conductive samples, Charge injection, Silica, Alumina
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